Femtosecond laser micromachining was first demonstrated in 1994, when a femtosecond laser was used to ablate micrometre-sized features on silica and silver surfaces 1,2. In less than ten years the ...
Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, China Atomic Layer Deposition,Metal ...
Atomic Layer Deposition,Ferroelectric Field-effect Transistor,Gate Stack,Charge Trapping,Metal Gate,Ferroelectric Polarization,Memory Window,Physical Vapor Deposition,Ferroelectric ...
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